Fundamentals of semiconductor fabrication
By : Gary S May
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Material type: 
TextISBN: 9780471232797.Subject(s): Semiconductors -- Design and constructionDDC classification: 621.38152 Online resources: Click here to access online Summary: Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequencePresents comprehensive coverage of process sequencesIntroduces readers to modern simulation toolsAddresses the practical aspects of integrated circuit fabricationClearly explains basic processing theory
| Item type | Current location | Collection | Call number | Status | Notes | Date due | Barcode |
|---|---|---|---|---|---|---|---|
e-Book
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Library of SLTC | e-Books Collection | 621.38152 MAY (Browse shelf) | Not for loan | Nano Devices, Fabrications & Testing |
Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequencePresents comprehensive coverage of process sequencesIntroduces readers to modern simulation toolsAddresses the practical aspects of integrated circuit fabricationClearly explains basic processing theory
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